VMS-53

○ It takes little established space.
○ Suitable for a little production.
VMS-53
【Vacuum Chamber】
VMS-53

（㎜）
Vacuum Chamber(Seal Imprint) Packaging
Ability		 Power
Supply		 Vacuum
Pump		 Dimension Weight
W D P W D H
285
(3.5㎜×
270×1)
Single Seal		 345
(310)		 130 1.5～2.5
times/min.		 1 phase 100V
50/60Hz
0.8kw		 50Hz:
133L/min.
60Hz:
160L/min.		 320 440 293 38㎏


VMS-153

○ Suitable for a little production and takes little established space.
○ Anti-rust frame with stainless steal.
○ Digital operation panel (nine kinds of program memory and test program memory) which was superior in operability.
○ Gas-Flush function is equiped.
VMS-153
【Vacuum Chamber】
VMS153

（㎜）
Vacuum Chamebr(Seal Imprint) Packaging
Ability		 Power
Supply		 Vacuum
Pump		 Dimension weight
W D P W D H
430
(3.5㎜×
410×1)
Double Seal		 420
(370)		 170 1.5～2.5
times/min		 3 phase 200V
50/60Hz
1.6kw		 50Hz:
350L/min.
60Hz:
420L/min.		 480 515 440 68㎏

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