VMS-53

› It takes little established space.
› Suitable for a little production.
VMS-53
yVacuum Chamberz
VMS-53

i‡oj
Vacuum Chamber(Seal Imprint) Packaging
Ability
Power
Supply
Vacuum
Pump
Dimension Weight
W D P W D H
285
(3.5‡o~
270~1)
Single Seal
345
(310)
130 1.5`2.5
times/min.
1 phase 100V
50/60Hz
0.8kw
50Hz:
133L/min.
60Hz:
160L/min.
320 440 293 38‡s


VMS-153

› Suitable for a little production and takes little established space.
› Anti-rust frame with stainless steal.
› Digital operation panel (nine kinds of program memory and test program memory) which was superior in operability.
› Gas-Flush function is equiped.
VMS-153
yVacuum Chamberz
VMS153

i‡oj
Vacuum Chamebr(Seal Imprint) Packaging
Ability
Power
Supply
Vacuum
Pump
Dimension weight
W D P W D H
430
(3.5‡o~
410~1)
Double Seal
420
(370)
170 1.5`2.5
times/min
3 phase 200V
50/60Hz
1.6kw
50Hz:
350L/min.
60Hz:
420L/min.
480 515 440 68‡s

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